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残余气体分析仪

The ProtaR Residual Gas Analyser (RGA) from Protea represents the smallest footprint electronics and maximum performance for value of any RGA on the market 

Protea’s ProtaR RGA is a compact, stable and robustly designed Quadrupole Mass Spectrometer (QMS) instrument incorporating all the latest Quadrupole technology. With variable mass ranges of 0-100amu, 0-200amu or 0-300amu,ProtaR is a useful analytical tool for testing and residual gas analysis in leak testing, semi-conductor, coating and process applications, being able to detect and measure almost all gases with low detection limits and fast response. A mass spectrometer measures the mass-to-charge ratio of the molecules in a sample and by collecting and analysing the mass spectrum we can identity and quantify which molecules are present. The QMS within ProtaR contains a mass filter that is made up of 4 parallel circular rods, hence the name quadrupole. 

[  Very quick (millisecond) response time

[  Detects almost any gas

[  Low maintenance costs, with corrosion resistance inlets

[  Advanced chemometrics for multi-gas quantification

 

 

Application Overview

[  Vacuum Furnaces

[  Semi-Conductor Processes

[  Metalurgy

[  Research and Development

[  Vacuum Process

[  Integration with existing vacuum systems


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